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gil tosa leakage test

Japanese Journal of Applied Physics, Volume 55, Number 4S ... current density of the bilayer liner is improved to a level comparable with the PETEOS oxide liner post annealing [forming gas (N 2 /H 2) at 350 °C for 2 h or 400 °C for 0.5 h]. Low- k material with a smaller elastic modulus improves the thermo-mechanical stress exerted on the surrounding Si substrate compared with PETEOS oxide.

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